The IVWF series shutoff valves have a simple structure, and can be installed in the vacuum exhaust line of a semiconductor tools.
The valve shuts off flow when rotating the flapper type valve mechanism 90°.

• Specifications :
  • These valves feature compact size and light weight due to their simple structure, and attaching one of these valves is easy.
  • The manual valves control the amount of flow by adjusting the degree of opening and can be set to an arbitrary degree of opening by fixing a lock screw.
  • The structure of the throttle valves enables the degree of opening to be reproduced by graduations on the micrometer handle, and micro-adjustments is made possible by a differential screw mechanism.

• Technical Characteristics :