The IVBH series vacuum valves have built-in spiral heaters that follow the movement of the bellows, and the valve and the bellows can be heated with the valve in either the open or closed state. These valves eliminate cold spots because heat is applied not only from an external heater but also from the inside of the bellows, which will reduce byproduct buildup. The internal and external heaters have individual channels and can heat independently to an arbitrary temperatures up to 180°C. In addition, a magnetic proximity open/close switch, and thermostat are available as options.

Specifications:

• • Because of the internal heater, byproduct adhesion to the O-ring seal surface is reduced, and long-term seal performance can be maintained.
  • Buildup on the bellows surface is reduced, so there will be less residue fallout when the bellows moves, resulting in minimal particle generation.
  • Reduced buildup getting caught in the bellows surface, resulting in higher durability bellows.(1 million cycles, actual results)
  • The connecting flanges are chosen from variety of industry standard fittings, including ISO/KF, JIS VF/VG, ConFlat flange, and ISO MF connections.
  • Electrical wires for the heater, thermocouples, thermostat (optional), and proximity sensor (optional) may be furnished with user specified connectors.
  • In addition, special specifications, such as unique brackets, non-standard face-to face dimension, special flanges, special materials (body, bellows, seal materials), and air fittings can be accommodated.

• Technical Characteristics :