The WD series valves are high performance diaphragm valves suitable for liquid materials.

• Specifications :
  • Capable of using high purity liquid materials such as TEOS used for semiconductor and liquid-crystal production.
  • Seat assembly can be replaced on the user side while maintaining the valve’s basic properties, particle performance, and purge characteristics.
  • Effective in improving ease of maintenance and reducing running costs for chemical canisters that require periodic cleaning.
  • Seat assembly replacement tool is the same for both manual and pneumatic operation.
  • With an actuator diameter of φ39.7mm, it is possible to suport a 40mm line pitch.

• Technical Characteristics :