The KD series realizes a high Cv value for compactly designed direct diaphragm valves. These valves are of the quality that they can handle the high-purity gases used in semiconductor production facilities, and they also have high durability and high corrosion resistance performance.

• Specifications:
  
  • Excellent purge characteristic is realized by minimizing the internal volume to 1.2cm3 (1/4” Male CVC, Open) through reduction of vertical flow paths.
  • Original wetted area seal mechanism enables highest sealing performance, durability, purge performance, and corrosion resistance.
  • High corrosion resistance performance by carefully selected diaphragm materials and ultimately smallest individual differences based on KITZ SCT’s original molding method realized high durability performance.
  • Handles high-purity gases used with semiconductors and pursues particle performance to the ultimate degree by means of the highest-level production environment and polished inner surfaces.

• Characteristics :