General presentation UHT

KITZ SCT
General presentation UHT

Higher purity and high reliability are essential in the gas supply systems used in

semiconductor fabrication processes
KITZ SCT's superclean valves (SCVs) are products that boast high reliability and
high durability to meet the exact needs of our customers. The excellent features of
the SCVs include improved gas exchange characteristics because of minimal
internal capacity, better degassing characteristics due to the smaller surface area
of the seat that comes into contact with gas, prevention of plastic expansion, and
improved valve operation speed due to the use of aluminum in the piston.
KITZ-SCT supplies the high-grade model "KD series" and other products suited for
a variety of uses with a high level of technological capabilities and abundant
know-how.

XD Vanne diaphragme inox

KITZ SCT

La série XD est parfaitement adaptée pour les applications gaz de haute pureté les plus exigeantes en termes de résistance à la corrosion et génération de particule.

La série XD est disponible en manuelle ou pneumatique, avec différentes dimensions et raccords.

<u>Les caractéristiques de ces vannes sont les suivants :</u>

  • Vanne diaphragme inox
  • Pneumatique normalement fermée ou manuelle
  • Taille ¼’’, ½, ¾’’
  • Connection : VCR, double bague, tube/tube
  • Matériau:  SUS316L
  • Matériau du siège : PCTFE, PI, PFA
  • Température du fluide  - 10 ~ 80°C
  • Taux de fuite : 1 x10 -10 Pa.m3/sec
  • Cv : 0.27 à 1,7
  • Etat de surface : Ra =0.5 µm
  • Cycle life = 4 Million cycle